Resumen
The invention relates to a device for filtering bulk acoustic waves BAW, which includes a plurality of filters, with a plurality of resonators, with different resonant frequencies integrated on a common substrate, the manufacturing method including: depositing an acoustic and electric insulation structure (2, 3) on the top surface of a substrate; depositing a layer of a metal as a bottom electrode (4) and a seed for growing the subsequent layer; sequentially depositing a plurality of thin layers of a piezoelectric material (5, 6) on the bottom electrode (4), located at the positions in which a resonator, with the frequency corresponding to the thickness of said layers, is to be placed, and subsequent engraving thereof; removing all the material used as a mask for the engraving performed; depositing, on all the resonators, a metal layer with a constant thickness, which constitutes the top electrode (7) of every resonator of every filter.