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Device for holding microstructure to be heated has connecting arrangement between plate and frame with bridge body(ies) with bearer frame, bearer plate, intermediate connecting sectionsCM Patents

The device has a bearer plate (1) on which the microstructure is mounted and that is enclosed by a bearer frame (5) at a distance and a connecting arrangement connecting the plate and frame with at least one bridge body (13,14) with bearer frame, bearer plate and intermediate insulation holder connecting sections. The bridge body material has lower thermal conductivity than the bearer plate and bearer frame. Independent claims are also included for the following: a method of manufacturing a device for holding a microstructure to be heated.

Datos clave

CategoríaInvención

Índice de la ficha

Updated at
05/11/2026
Numero publicacion
DE.19944410.A1
Fecha publicacion
12/04/2001
Anio publicacion
2001
Numero solicitud
DE1999144410
Fecha presentacion
16/09/1999

Etiquetas

Inventores
Boettner, HaraldBoettner HaraldSeibert KlausSeibert, KlausCane, CarlesCane CarlesGoetz AndreasGoetz, Andreas
Solicitantes
Fraunhofer-Gesellschaft Zur Foerderung der Angewandten Forschung EVRoland CorporationFraunhofer Ges ForschungConsejo Superior de Investigaciones Científicas
Clasificacion ipc
G01N 27/ 12 A I
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