Resumen
New integrated ultra-high sensitivity mechanical deflection sensor. The proposed invention consists of a new optical sensor formed by a grooved guide integrated in a resonator or optical interferometer. The grooved guide consists of two strips of a high refractive index material, separated by a material of low refractive index. This structure is extremely sensitive to small variations in the distance between the guide strips. This distance is varied by converting one of them into a mobile or mechanical element ("cantilever"). The applications of these sensors include the detection of any type of agent capable of producing a small deflection of the mechanical element of the sensor, for example: biomolecular and biochemical interactions, gases and explosives, electro- and magnetostatic fields, electromagnetic radiation, movement, accelerometry and force microscopy by tracking. (Machine-translation by Google Translate, not legally binding)